Abatement discoveries drive innovation across the Fab

Summary
For an experimental Research and Development (R&D) facility, crucial experimental test runs can make or break a new product development. The experimental and variable nature of the research and development work creates unavoidable fluctuations in the vacuum and abatement system. The risk of an unexpected down event can’t be prevented under a time-based maintenance schedule. See how this facility made critical discoveries in the SubFab to shape future innovation across the Fab. |
