Operational Excellence

Fast and flexible operations from the clean room to the SubFab are propelling customers ambitious growth targets, but how does this translate to the maintenance approach for the vacuum and abatement system?

To help semiconductor manufacturers assess their own approach to maintenance, the key characteristics of each maintenance level are outlined in this service maturity infographic.

The infographic is an excerpt from the recent Semiconductor Digest blog Upstairs/Downstairs: Chamber to SubFab.

Download The Service Maturity Model Infographic

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