Fab mitigates carbon footprint with new energy efficiency initiatives
Semiconductor manufacturers are striving to reduce greenhouse gas (GHG) emissions while increasing production. Utility consumption, including power, water and process gasses are a prime target for vendors and manufacturers across the supply chain to put in place measures to reduce their carbon footprint.
20% of a Fab’s power consumption is from vacuum and abatement processes
This Fab needed a reliable way to reduce the environmental impact and utility costs associated with SubFab operations. The vacuum and abatement systems are designed to perform 24 hours a day, seven days a week. However, significant utility cost savings can be achieved by putting equipment into a low power “Green Mode” when the process tools are idle.
Although electrical power was the chosen utility, a process was needed that could be applied to combustible fuel, waste water treatment, purge gases and other consumables.
Unnecessary power consumption and operational costs
The challenge did not lie with the equipment but in establishing a reliable process for communicating when to start and end “Green Mode” status from the process tools to the vacuum system. Not all process tools have a “Green Mode” signal available for this function.
Leaving the system in “Production Mode” unnecessarily increased the risks to expensive process tools, wafer products, and the safety of personnel.
Switching to lower energy usage when a process tool is idle, or during maintenance, would minimise both utility consumption and operational costs.
Concerns across the Fab
- Carbon neutrality and energy reduction targets
- Additional burden on safety and maintenance teams
- Increases in operational expenses
This Fab needed a reliable way to reduce the environmental impact and utility costs associated with SubFab operations.
Find out how this customer achieved C02 equivalent kgs savings
Download this e-book to find out more on this customer’s approach to energy efficiency in the SubFab. This e-book provides examples of the energy savings converted to Co2 by country.