Operational Excellence
Customer Use Case: Wafer yield and process tool efficiency


Yield levels on several processing tools weren’t achieving their target but repeat investigations didn’t show a clear cause. On one process tool, the wafer throughput was at 10% of its peers. The process and equipment engineers needed to investigate further to find hidden variables that could be jeopardizing performance.

See how this foundry addressed root causes of process tool inefficiency by optimising the SubFab.

Download the full use case as an interactive e-book or PDF

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