How can Edwards reduce power consumption and maintain system reliability?
The cost of energy is a significant portion of a fab operating budget. Energy cost can be up to 30 percent of fab operating expenses, depending on local electricity rates. Wafer processing tools and support equipment account for nearly 50% of the total energy consumed.
Additionally, power reduction is often a government mandate, or corporate goal to meet “Green Initiatives.” Therefore, the pressure to reduce energy consumption is not only measured in economic terms, but in political terms, as well.
Neil Garland, Global Product Manger, discusses how Edwards understands the need to reduce power consumption and maintain system reliability.
To read more, download Alan Brightman’s article Critical Parameters for Equipment Used on New Harsh Processes, below.