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Improve tool availability and yield. Eliminate risk and uncertainty in the smart SubFab

Why the SubFab?

Wafer output, yield, uptime, and most importantly safety are critical success factors of the semiconductor fab. Although the SubFab is recognised as a contributor to success, it is unlike the highly automated clean room: it is a harsh and complex environment where people interact closely with machines and processes.

Smart Manufacturing is seen as a way to improve effectiveness, but if the focus is too much on IOT technology, environments like the SubFab can’t support the success of the wider fab. Our approach is to reduce risk and uncertainty and create value by connecting machines, people and processes to fab objectives. This approach is what we call Operational Excellence.

A guide to Operational Excellence

Learn more about Edwards’ approach to enabling Smart Manufacturing in the SubFab

Download E-book

Download E-book

Learn more about Edwards’ approach to enabling Smart Manufacturing in the SubFab

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Market Insights

Blog Post: Achieving the 6 key performance metrics from the SubFab to the Cleanroom

Safety, Quality, Delivery, Cost, People and Environment (SQDCPE) are critical to performance. Download the e-book to understand how the vacuum and abatement system can positively impact each metric.

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The Circular Economy: What is the business value of the circular economy?

The environmental benefits from the circular economy are widely known, what is overlooked is the true business value of circularity.

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Infographic: Evaluating Service Maturity

Fast and flexible operations from the clean room to the SubFab are propelling customers ambitious growth targets, but how does this translate to the maintenance strategy?

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Infographic: Clean Room Vs the SubFab

Identify the opportunities to improve yields, reduce downtime, avoid scrapped wafers, decrease maintenance costs and more.

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Web Cast: Data Sharing and the cost of inaction

Erik Collart examines how customers are using data to improve effectiveness of the SubFab and avoid unplanned downtime

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Blog Post: Smart Manufacturing and the 5 key areas for change in the SubFab

For Smart manufacturing to contribute to the success in the SubFab it must look beyond “big data analytics” or other technology-led plays. Vital improvements must be made across the SubFab

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