Visit Edwards main site

Why the SubFab?

Wafer output, yield, uptime, and most importantly safety are critical success factors of the semiconductor fab. Although the SubFab is recognised as a contributor to success, it is unlike the highly automated clean room: it is a harsh and complex environment where people interact closely with machines and processes.

Smart Manufacturing is seen as a way to improve effectiveness, but if the focus is too much on IOT technology, environments like the SubFab can’t support the success of the wider fab. Our approach is to reduce risk and uncertainty and create value by connecting machines, people and processes to fab objectives. This approach is what we call Operational Excellence.

Learn more

A guide to Operational Excellence

Learn more about Edwards’ approach to enabling Smart Manufacturing in the SubFab

Download E-book

Download E-book

Learn more about Edwards’ approach to enabling Smart Manufacturing in the SubFab

Edwards Vacuum is committed to protecting and respecting your privacy, and we’ll only use your personal information to administer your account and to provide information you requested from us. From time to time, we would like to contact you about our products and services, as well as other content that may be of interest to you. If you consent to us contacting you for this purpose, please tick below to say how you would like us to contact you:

You can unsubscribe from these communications at any time. For more information on how to unsubscribe, our privacy practices, and how we are committed to protecting and respecting your privacy, please review our Privacy Policy.

By clicking submit below, you consent to allow Edwards Vacuum to store and process the personal information submitted above to provide you the content requested.

Market Insights

The Circular Economy: What is the business value of the circular economy?

The environmental benefits from the circular economy are widely known, what is overlooked is the true business value of circularity.

Read more

Infographic: Clean Room Vs the SubFab

Identify the opportunities to improve yields, reduce downtime, avoid scrapped wafers, decrease maintenance costs and more.

Read more

Web Cast: Data Sharing and the cost of inaction

Erik Collart examines how customers are using data to improve effectiveness of the SubFab and avoid unplanned downtime

Read more

Blog Post: Evaluating Service Maturity

Fast and flexible operations from the clean room to the SubFab are propelling customers ambitious growth targets, but how does this translate to the maintenance strategy?

Read more

Subscribe and get the latest papers straight in your inbox


Cookies on the Edwards Innovation Hub website

Cookies help us deliver our services. By using this site you agree to the use of cookies. We do not store any personal details.

Continue No, I want to read more