Operational Excellence

Foundry avoids a batch wafer loss by eliminating risk in SubFab

Customer Use Case: Wafer Loss and Tool Uptime in a 300mm Fab

Summary

An exciting new growth phase for this foundry meant that all variables effecting performance needed to be addressed. Unplanned vacuum system failures during wafer processing were a pressing concern. Advancing semiconductor manufacturing processes were also placing increasing demands on vacuum and abatement equipment. 

See how this foundry uncovered more tool time and prevented unplanned down time in the SubFab.  

Download the full use case as an interactive e-book or PDF

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